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紫外線二氧化鈦技術

The sglux semiconductor production

sg lux produces optoelectronic components based on thin film compound semiconductors. The novel fabrication process of a striking simplicity is based on Sol-Gel chemistry. It replaces traditional high-temperature doping processes and expensive epitaxy equipment. All wafer-level production processes occur in house on our production plant in Berlin. This includes the semiconductor chemistry, coating, patterning, metallization and dicing. We are well-equipped with characterization tools for development, testing and quality control. Highlights are our sophisticated spectral responsivity setup for the UV and Vis and the long-run UV irradiation chamber to check for the UV irradiation hardness.

The picture shows an UV-photodiode on a Sol-Gel coated 10x10cm2 wafer.

The TiO2 semiconductor

A variety of semiconductor materials can be found in the II-VI compounds with metal oxides and sulfides amongst.
Sol-Gel chemistry is an exceptionally attractive method for their synthesis. Its flexibility allows a tailoring of the optical and electronic semiconductor properties as it is necessary for trend setting optoelectronics.

sg lux invented the process technology for a stable production of electronic components based on Sol-Gel chemistry. The substrate is coated with the thin film semiconductor by simply dipping it into solutions of liquid precursors. The benefits of such a cost-effective production are most competitive in the field of wide-bandgap optical detectors.
There, the established materials as SiC and GaN suffer from high material and plant costs which is particularly painful for photodetectors with a large sensing area and for consumer applications.

The REM-picture shows the semiconductur layers. We published details of the nature of the charge transport in our semiconductor layers in 2005.

The performance of sglux photodiodes

sg lux Schottky-type TiO 2 UV-photodiodes are inherently visible blind, being sensitive to ultraviolet radiation below = 400 nm only and not to visible light.
Due to the polycrystalline nature of our thin-film semiconductor the production effort scales only weakly with the chip's size. We therefore try to fit the largest possible photoactive area into the TO housings, giving many benefits like a large photocurrent and only a weak dependency on the incident angle.
The polycrystalline nature is also responsible for the superior UV-radiation hardness. The disadvantages compared to monocrystalline devices should not remain unmentioned: The response time is as long as 100 μs and the quantum efficiency does not exceed 20%.

However, the low sensitivity is easily over-compensated by the large photoactive area. You get more photocurrent for your money with sg lux .

The UV photodiodes based on our TiO2 Semiconducter technologie are:

TW30SX , TW30SY , EryF , TW30DZ , TW30DY , TW30DY2

Sol-Gel coating service

Our Sol-Gel process equipment can be used for other coating applications of metal-oxides as well. Appart from TiO 2 , we are experienced in SiO 2 , ZrO 2 , Ta 2 O 5 and ZnO. According to the customer's demand, we produce coatings for

- solar cells

- photocatalytic activity,

- optical filters,

- anti-reflection layers

- protective films.

Contact us with your needs.

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地址:台北市長安東路二段171號4樓之3
Address:4F-3. No.171. Sec.2. Chang An.E.Rd. Taipei. Taiwan. R.O.C.
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Tel:886-2-27111093~5
傳真:(02)27310902, 27764624
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TEL:886-2-2711-1093~5 FAX:886-2-2731-0902 ,2776-4624