HL-Planartechnik GmbH offers a wide range of products in planar microstructures for automotive, medical, household and industrial appliances since 1988. With services ranging from standard components up to a complete solution for customer specific tasks, we can offer the customer access to a whole range of microsystem technologies.
HL-Planartechnik`s Foundry Service charter is to identify customized products and to obtain and refine the competence of the technology. In this way it is possible to develop and produce application specific products. The Foundry Service is based on our proven, standard MEMS technologies. Using our wafer technology with its micro-structured techniques, state-of-the-art equipment and production experience, HL-Planartechnik GmbH can develop an individual solution for every customer.
individually developed and application specific products
high volume production
4'' and 6'' wafer technology
professional process control & characterization
ISO/TS conforming production
HL-Planartechik GmbH offers its MST technology process for building functional elements or blocks on wafers up to 6" size as foundry service. The elements may consist of silicon / siliconoxinitride and metallic microstructures.
The functionality covers the whole range from
mechanical (i.e. switches, actors, guidances) to
electronical (thermo-, or magnetoresistive bridges) and even
optical (waveguides, mirrors) applications.
Therefore we are also able to do complete wafer-processes for complex customer specific MST chips, usually consisting of several functional elements.
The wafer technology comprises
PVD (e-beam, sputtering)
standard process materials:
Ag, Au, Al, BiSb, Cr, CrSi, Cu, Fe, Ni, NiCr, NiFe, Pd, Pt, SiO2, SiON, Ta, TaN, Ti, TiW
others on request
lithography (b > 1µ)
dry etching (IBE, RIBE, RIE)
membranes / thermic isolation
holder for transition-electron-microscopy
V-grooves for optical components
cavities for Biomems
Inspection and final testing
100 % optical inspection eliminates:
defects in structure geometry
small residues of metal on the surface
100 % electrical inspection
electrical test of special component features through the use of intelligent test chips
The major foundry business at HL-Planartechnik GmbH is today made with the production of heat-flowsensors for the automotiv industry. The sensor-chip contains metallic heaters and thermoresistors forming well defined heat flow measuring units. To minimize the disturbing heat-exchange with the sourrounding material, both elements must be placed on a very thin silicon-nitride membrane.
HL-Planartechnik GmbH does the complete manufacturing of heat-flow sensor wafers including the ISO/TS conform characterization, testing and documentation.
Our customers ust the chips for mass flow-control and gas detection in all kinds of automotive engines, i.e. diesel- and hydrogen-engines.